| GENERAL INFORMATION: | Instructors: Georgoulas Nikolaos, Girginoudi Dimitra, Farmakis Filippos Semester: 7th |
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| CREDITS: | ECTS Units: 4 Teaching Units: 4 Theory Hours: 2 Exercises Hours: 1 Lab Hours: 2 |
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Course Description |
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Microelectronic Technology for device fabrication: Thin film deposition techniques (epitaxy, Chemical Vapor Deposition, Physical Vapor Deposition), oxidation, photolithography, semiconductor doping, metallization. PN junction, Bipolar Transistor, MOS capacitor, MOSFET. |
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